Measurement Range:0 to 100 Pa

Accuracy:±0.1% F.S.

Operating Temperature:-20°C to +60°C

Response Time:Less than 5 seconds

Power Supply:12V DC

Connection Type:RS485 interface

    The ULVAC BPR2 G-TRAN Pirani Gauge Box Unit is engineered for precision and durability, making it indispensable for the stringent demands of semiconductor fabrication. Its advanced Pirani gauge technology ensures accurate and real-time monitoring of gas flows, critical for maintaining optimal process conditions.

    This unit boasts an exceptionally wide operating range, from ultra-high vacuum to low pressure, accommodating diverse applications within the semiconductor industry. Its ±1% full-scale accuracy is unparalleled, ensuring reliable measurements throughout its operational lifespan.

    Designed with user convenience in mind, the ULVAC BPR2 G-TRAN features a compact yet robust structure that facilitates easy integration into existing vacuum systems. Its temperature and humidity tolerance make it suitable for various environments, enhancing its versatility.

    Innovative features include remote diagnostics capabilities, enabling users to monitor the gauge’s performance remotely, and enhanced data logging functionalities for comprehensive analysis of vacuum processes. This not only optimizes maintenance schedules but also contributes to continuous improvement in production efficiency.

    Built with high-quality materials, the ULVAC BPR2 G-TRAN Pirani Gauge Box Unit ensures long-term reliability and minimal downtime, significantly reducing maintenance costs and downtime risks associated with vacuum measurement equipment.