Manufacturer is Tokyo Electron. Part number is 1380-101545-11. System application is TEL Mark 8 eight-inch track. Subsystem is SMIF indexer and pod loader. Board type is connection or interface PCBA. Interface topology uses multipin backplane and harness connectors. Recommended cleanroom enclosure environment is 15°C to 30°C, non-condensing.

The board provides high-density trace routing for indexer signals, SMIF pod-present and handler communication, and noise-suppression layout for semiconductor cleanroom use. It supports continuity between the loader mechanics and the track controller.

Use the board in TEL Mark 8 SMIF pod opening, wafer indexing, and loader communication workflows. It is intended for eight-inch wafer track maintenance and replacement where pod-loading handshakes are processed through the indexer interface.

The assembly uses a multilayer printed circuit with multipin backplane connectors, surface-mount components, and industrial coating or conformal protection suitable for cleanroom enclosures.

The controller sends pod and wafer-handler commands through the backplane. The connection board distributes those signals to indexer actuators, sensors, and interlock circuits while returning status to the system controller.

Install only in the designated Mark 8 SMIF indexer slot. Verify board revision against the tool software and hardware configuration. De-energize the indexer rack before insertion. Inspect edge and harness connectors for contamination or pin damage.

Do not insert or remove the board with active rack power. Seat all multipin harnesses fully to avoid intermittent pod-present errors. Do not substitute this part into Mark V or later Clean Track platforms without confirmation.