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Kollmorgen MAG04-25041-XXX
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Product Name: MAG04-25041 EMAX 4-Channel Magnet Driver PCB / Power Card (Applied Materials OEM board)
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Brief: Not a servo drive but a 4-channel electromagnet bias/coil driver printed-circuit assembly used in PVD/etch tooling.
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Specifications:
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Type: 4-channel magnet/coil driver, DC bias output
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Detailed content
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Bus: Tool 24 VDC / ±15 V aux (OEM-defined)
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Output: Current-controlled coil drive, per-channel trim
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Form: 6U/3U Eurocard PCB, 922665 assembly no.
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Features: Linear current amps, thermal shutdown, isolated channels.
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Applications: Semiconductor PVD chamber magnetron bias, beam-steering coils.
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Precautions: XXX = custom revision; calibration constants are board-specific, do not swap across tools without re-calibration.
