Digital guide

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Kollmorgen BLF2924-10-0-S-020

    • Product Name:​ BLF2924 Brushless Motor Assembly (SRD Spin-Rinse Dryer Motor Assembly, “MOTOR DRIVE ASM 280”)
    • Product Brief:​ Custom brushless spindle motor assembly originally built for semiconductor spin-rinse-dryer (SRD) subsystems (OEM-specific, not general catalog motor).

Detailed content

  • Technical Specifications:
    • Type: 3-phase brushless DC/AC motor assembly
    • Voltage/Current: OEM-defined (typically 200–240 VAC drive-fed or 300 VDC bus)
    • Construction: Aluminum housing, integral rotor disc for high-speed spin (3000+ RPM typical for SRD)
    • Feedback: Hall or encoder per OEM build
  • Features:​ Balanced rotor for high RPM, chemical-resistant seals, integrated mounting flange for bowl/chuck.
  • Applications:​ Wafer spin rinse, photoresist coat/develop spinners, flat-panel cleaning.
  • Precautions:​ Not a standard AKM/BLD-series motor; do not substitute with catalog motor without re-validating inertia and sealing.

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