Technical Specifications​

AC input: 200 to 220 VAC and 230 to 240 VAC, 13 A, 50/60 Hz; certain unit nameplates list 100 to 240 VAC universal input, verify before energizing

Laser class: 30 mW argon-ion

Regulation: closed-loop optical feedback current regulation

Control interface: multi-pin DB control connector for ignition command, status, interlock and light-loop signals

Dimensions: 310 × 210 × 110 mm

Weight: 3.5 kg

Compatible systems: Surfscan 6200, 6220, 6400, 6420, AIT I, SP1 Classic and related inspection platforms

Operating environment: cleanroom equipment rack, 15 to 30 °C, non-condensing

Functional Features​

High-voltage ignition for argon plasma start

Closed-loop optical feedback for stable 30 mW output

Constant-current and constant-light-intensity operating modes

Standby low-current maintenance for fast restart

Internal calibration controls for tube current and light-loop gain

Remote interlock monitoring through DB control connector

Application Scenarios​

Unpatterned wafer surface inspection

Particle and defect detection on Surfscan platforms

Photolithography support metrology and laser sources

Semiconductor fab AIT and SP1 inspection systems

Performance Parameters​

Output stability governed by optical feedback loop and calibrated current setpoint

Ignition sequence includes cathode warm-up, high-voltage strike and run-mode transition

Standby mode maintains low tube current for rapid return to full output

Beam stability depends on laser tube condition, cooling airflow and calibration settings

Material Composition​

Chassis: metal laser-power enclosure with ventilation openings

High-voltage section: transformer, capacitor bank, switching semiconductors and ignition circuitry

Control board: industrial PCB with optical-feedback amplifier, interlock logic and calibration components

Connectors: DB control connector and high-voltage laser umbilical interface

Structural Characteristics​

Bench or rack-mount laser power chassis

Separate high-voltage output umbilical to argon laser head

DB control port for host communication and safety interlock

Accessible calibration components for qualified service personnel

Forced-air cooling with internal fan and heat dissipation surfaces

Working Principle​

AC input is converted and regulated to supply cathode heating, high-voltage ignition and sustained tube current. After plasma strike, an optical sensor samples laser power and sends feedback to the control circuit. The regulator adjusts tube current to hold the selected 30 mW output or the commanded light level, while interlock signals prevent operation when safety conditions are not satisfied.

Installation Requirements​

Install in a grounded cleanroom rack with adequate airflow

Connect AC input strictly according to the unit nameplate voltage range

Lock the high-voltage laser umbilical fully before applying power

Connect DB control, interlock and host signal cables with correct pin assignment

Verify laser head type, cooling condition and interlock loop before start-up

Usage Notes​

Do not open the chassis or touch the umbilical while energized

High-voltage capacitors retain dangerous charge after AC disconnect

Perform current and light-output calibration after replacement or tube service

Never look directly into the laser aperture

Maintain ambient temperature and humidity within the specified cleanroom range