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Gasonics AWO-1-3 Optical Window
Introduction:
The Gasonics AWO-1-3 is an optical viewport assembly with a specific dimension (likely 1.3 inches or a corresponding flange code). It bridges the gap between the smallest and medium-sized viewports, offering a balance of optical access and mechanical robustness.
Technical Specifications:
- Optical Element: Fused Quartz
- Clear Aperture: Specific to AWO-1-3 (e.g., 1.375 inches)
Detailed content
- Transmission: >90% in visible spectrum
- Vacuum Level: UHV compatible (< 1 x 10^-9 Torr)
- Flange Type: ISO-K or Custom Bolt Circle
- Pressure: Atmospheric differential
- Outgassing: Low outgassing elastomers or metal seals
Functional Features:
- Optical Clarity: High-quality polish for distortion-free viewing.
- Mechanical Strength: Sufficient thickness to withstand pressure differentials and handling.
- Chemical Inertness: Resistant to plasma etching and chemical byproducts.
- Easy Installation: Designed for straightforward mounting on chamber walls.
Application Scenarios:
- Process Monitoring: Standard viewing port on etch and deposition chambers.
- Diagnostic Access: Housing for optical emission spectroscopy fibers.
- Chamber Cleaning Verification: Visual check for residue after dry clean cycles.
- Safety Observation: Monitoring for abnormal arcing or sparks.
