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Gasonics AWO-1-2 Optical Viewport
Introduction:
The Gasonics AWO-1-2 is a specific optical viewport configuration. It is a critical component for maintaining vacuum integrity while allowing light to pass through the chamber wall. This model is often used in older or specific generations of Gasonics equipment.
Technical Specifications:
- Window Type: Circular Optical Flat
- Material: Synthetic Fused Silica
Detailed content
- Diameter: Defined by “1-2” spec (e.g., 1.25 inches or 32mm)
- Vacuum Rating: High Vacuum (1 x 10^-8 Torr)
- Temperature Range: -30°C to +200°C
- Seal: Viton O-ring or Metal Gasket
Functional Features:
- Vacuum Seal: Prevents air ingress and maintains process pressure.
- Optical Transmission: Allows visual and sensor-based monitoring.
- Durability: Resistant to thermal shock and mechanical vibration.
- Serviceability: Can be disassembled for cleaning or window replacement.
Application Scenarios:
- Visual Inspection: Primary port for operators to see the plasma.
- Optical Sensors: Mounting base for pyrometers and cameras.
- Laser Windows: Transmitting laser energy for alignment or processing.
- Chamber Interlocks: Part of a safety system ensuring the viewport is sealed before processing.
