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Gasonics AWO-1-16 Optical Viewport Assembly
Introduction:
The Gasonics AWO-1-16 is a high-precision optical viewport designed for integration into vacuum chamber walls or doors. It provides a sealed optical path for visual inspection, process monitoring, and optical diagnostic systems. This component is engineered to withstand high vacuum environments, thermal cycling, and aggressive plasma conditions while maintaining optical clarity.
Technical Specifications:
- Optical Material: Synthetic Fused Silica (Quartz) or Borosilicate Glass
Detailed content
- Diameter: 1.6 inches (Nominal clear aperture) or corresponding metric flange size
- Transmission Range: 200 nm to 2500 nm (UV to Near-IR)
- Vacuum Rating: 1 x 10^-9 Torr (Ultra-High Vacuum compatible)
- Bakeout Temperature: Up to 200°C (Quartz) / 150°C (Borosilicate)
- Flange Type: ISO-K, ISO-F, or Custom Conflat (CF)
- Pressure Differential: 14.7 psi (Full atmospheric load)
- Surface Finish: 10-5 Scratch-Dig (Optical quality)
Functional Features:
- Anti-Reflective Coating: Optional magnesium fluoride coating to reduce glare and increase light transmission for sensors.
- Plasma Erosion Resistance: Quartz construction resists darkening (solarization) caused by high-energy UV radiation from the plasma.
- Zero-Leak Seal: Metal-to-glass or elastomer seal design ensures vacuum integrity over thousands of thermal cycles.
- Easy Replacement: Designed for tool-less removal from the exterior in many chamber configurations to facilitate cleaning.
Application Scenarios:
- Optical Emission Spectroscopy (OES): Providing a window for sensors to analyze plasma chemistry and detect process endpoints.
- Pyrometry: Allowing infrared sensors to measure wafer temperature during heating processes.
- Visual Inspection: Enabling operators to monitor plasma color, uniformity, and arcing events visually.
- Laser Alignment: Serving as a reference point for alignment lasers in lithography or metrology tools.
