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Gasonics AWD-D-3-8-008 Pneumatic Diaphragm Valve
Introduction:
This specific part number denotes a pneumatic diaphragm valve from the AWD series with a 3/8-inch port size and a specific configuration code “008”. These valves are compact, high-purity devices used for controlling small flows of aggressive or pure gases in semiconductor process tools. The diaphragm design ensures total isolation of the media from the valve’s moving parts.
Technical Specifications:
- Port Size: 3/8 inch (Typically VCR or Swagelok face seal fittings)
Detailed content
- Body Material: 316L Stainless Steel, Passivated and Electropolished
- Diaphragm Material: PTFE (Standard) or PFA (High Purity)
- Actuation Pressure: 60 to 100 PSI (Clean, dry air or Nitrogen)
- Maximum Operating Pressure: 150 PSIG (at 20°C)
- Temperature Range: -40°F to 450°F (-40°C to 232°C)
- Flow Coefficient (Cv): Approximately 0.6 to 0.8 (depending on orifice size)
Functional Features:
- Compact Footprint: Ideal for use in crowded gas boxes or sub-fab manifolds where space is limited.
- Zero-Leakage Performance: Diaphragm seal provides bubble-tight shutoff even after extended periods of inactivity.
- Chemical Compatibility: PTFE/PFA wetted parts resist virtually all corrosive chemicals used in semiconductor fabrication.
- Replaceable Diaphragm: Allows for easy maintenance and replacement of the seal without replacing the entire valve body.
- Visual Position Indicator: Magnetic or mechanical flag indicates valve position (Open/Closed).
Application Scenarios:
- Specialty Gas Control: Handling expensive or toxic gases like Phosphine (PH3), Arsine (AsH3), or Diborane (B2H6).
- Calibration Gas Lines: Routing calibration gases to sensors or MFCs.
- Pilot Valve Operation: Serving as a pilot to actuate larger valves or pneumatic cylinders.
- Purge Gas Isolation: Isolating purge lines when not in use to prevent back-diffusion of contaminants.
- Analytical Instrumentation: Controlling sample gas flows to mass spectrometers or particle counters.
