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Gasonics AWD-D-1-4-8
Product Description: The Gasonics AWD-D-1-4-8 is a compact, high-efficiency plasma stripping system. The nomenclature suggests a single-chamber tool (“1”) configured for specific process modules (“4”) capable of handling 200mm (“8-inch”) wafers. It is designed for standalone operation or integration into smaller lab-scale or pilot-line clusters.
Technical Specifications:
- Form Factor: Compact footprint suitable for lab environments
Detailed content
- Wafer Size: 150mm (6-inch) and 200mm (8-inch)
- RF Generator: Solid-state 13.56 MHz, typically 1000W – 3000W
- Process Gases: Oxygen, Argon, CF4, SF6
- Vacuum System: Turbo-molecular pump backed by a dry scroll pump
- Chuck Type: Aluminum or Ceramic chuck with helium backside cooling
Functional Features:
- User-Friendly Interface: Touchscreen HMI with recipe selection and real-time graphing of RF parameters.
- Fast Pump-Down: High-capacity vacuum system for rapid chamber evacuation.
- Flexible Chemistry: Supports a wide range of gas mixtures for different resist types (positive, negative, epoxy-based).
- Safety Interlocks: Comprehensive safety system including RF shielding and gas leak detection.
Application Scenarios:
- Research & Development: Ideal for process development labs in universities and R&D centers.1.
- Pilot Line Production: Small-scale production of MEMS or specialized semiconductors.
- Failure Analysis: Used in FA labs to decapsulate packages or strip layers for cross-sectioning.
- Optoelectronics: Cleaning of LED and Laser diode wafers.
