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Gasonics AWD-D-1-4–5-001
Product Description: This part number refers to a specific sub-system or kit for the AWD-D series, likely a 5-inch component or a configuration related to a 5-zone temperature control system. Alternatively, in some naming conventions, it refers to a specific “Type 1” chamber with “4” gas lines and a “5” kW generator configuration (001 revision). It is a specialized configuration for high-power ashing.
Technical Specifications:
- Power Output: 5000 Watt maximum RF power
Detailed content
- Zone Control: Multi-zone temperature control (possibly 5 zones for advanced uniformity)
- Gas Flow: 4 independent gas lines with mass flow controllers
- Chamber Material: Stainless steel 316L electropolished
- Windows: Quartz viewing window with RF shielding mesh
Functional Features:
- High-Density Plasma: The 5kW power allows for generation of high-density oxygen plasma for rapid ashing of thick resists.
- Uniformity Control: Multi-zone gas injection and temperature control ensure wafer-level uniformity.
- Advanced Diagnostics: Includes sensors for residual gas analysis (RGA) readiness.
- Remote Plasma Option: Can be configured to generate plasma remotely to reduce charged particle damage.
Application Scenarios:
- Thick Resist Stripping: Removal of >10um photoresist layers used in MEMS and bump processing.
- Descumming: High-power descumming after lithography to remove residual resist in via bottoms.
- Surface Activation: Plasma treatment to increase surface energy for better adhesion in subsequent steps (e.g., wafer bonding).
- Hard Mask Removal: Stripping of silicon oxide or nitride hard masks where high energy is required.
