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Gasonics AWD-D-1-4-10-001
Product Description: This model is a specific revision (001) of the AWD-D-1-4-10 configuration. The “10” may refer to a 10-slot cassette handler or a 10-zone showerhead design. It is a high-end automated plasma stripping system designed for the most demanding production environments, featuring advanced process control and redundancy.
Technical Specifications:
- Cassette Handler: 10-slot FOUP or cassette loader for high-volume unattended operation
Detailed content
- Chamber Design: 4-zone showerhead for precise gas distribution
- RF Power: 5000W solid-state generator with fast matching
- Vacuum: Low-vibration dry vacuum system
- Cleaning: In-situ plasma-enhanced chemical vapor deposition (PECVD) chamber clean capability
Functional Features:
- Full Automation: Load lock and robotic transfer allow for continuous processing of multiple wafers.
- Endpoint Detection: High-sensitivity optical emission spectroscopy to detect the endpoint of the strip process precisely, preventing over-etch.
- Process Repeatability: Statistical Process Control (SPC) data collection and export.
- Redundancy: Dual pumps and power supplies for high tool availability (uptime).
Application Scenarios:
- 24/7 Manufacturing: Logic foundries running continuous production shifts.
- Critical Layer Stripping: Removal of resist after critical etching steps where pattern integrity is paramount.
- Multi-Layer Resist Schemes: Capable of stripping complex multi-layer resist stacks (e.g., trilayer processes).
- Substrate Reclaim: Used to strip test wafers or reclaim expensive substrates in R&D and pilot lines.
