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Gasonics 95-0593 Vacuum Throttle Valve
Introduction:
The Gasonics 95-0593 is a precision vacuum throttle valve used to regulate the conductance of the vacuum pumping line. It is a critical component for controlling the process pressure within the chamber, which directly influences plasma density, etch rate, and deposition uniformity. This valve allows for fine adjustment of pressure between atmosphere and high vacuum.
Technical Specifications:
- Valve Type: Pneumatically Actuated Butterfly or Poppet Throttle Valve
- Port Size: 6-inch or 8-inch ISO-K or ISO-F Flange
Detailed content
- Control Range: 1 mTorr to 760 Torr (Full range)
- Actuation: Pneumatic cylinder (Spring return or Double acting)
- Position Feedback: Linear Variable Differential Transformer (LVDT) or Rotary Encoder
- Materials: Aluminum or Stainless Steel body, Buna-N or Viton seals
- Leak Rate: < 5 x 10^-7 std cc/sec (Helium)
- Bakeout Temperature: Up to 150°C
Functional Features:
- Linear Flow Characteristic: Valve opening percentage correlates linearly with flow conductance for predictable control.
- Closed-Loop Pressure Control: Can be integrated with a capacitance manometer for automatic pressure regulation.
- Fast Response Time: Optimized for rapid pressure changes required in modern process recipes.
- Low Outgassing: Materials selected to minimize contamination in high-vacuum environments.
- Manual Override: Hand wheel for manual positioning during maintenance or power loss.
Application Scenarios:
- Process Pressure Stabilization: Maintaining constant pressure during plasma etching to ensure critical dimension (CD) control.
- Chamber Pump-down: Regulating the pumping speed to prevent thermal stress on wafers during evacuation.
- Venting Operations: Controlled introduction of nitrogen to bring the chamber to atmospheric pressure safely.
- Load Lock Pumping: Managing the pressure differential between the load lock and the transfer chamber.
- Abatement Flow Control: Regulating the flow of toxic exhaust gases to the abatement system.
