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Gasonics 95-0503 95-3014
Product Description: This part number combination identifies a specific Preventive Maintenance (PM) Kit for Gasonics wet bench or strip tools. The “95-0503” serves as the base kit identifier, while “95-3014” specifies a sub-component, likely a set of Vacuum Pump Cartridges or Specific Seal Kits. These kits are essential for maintaining tool performance and uptime.
Technical Specifications:
- Kit Type: Preventive Maintenance Consumable Kit
Detailed content
- Contents:
- High-performance vacuum pump oil or dry pump cartridges.
- Fluoropolymer (Viton/Kalrez) O-rings for chamber doors and gas lines.
- HEPA/ULPA exhaust filters.
- RF window gaskets and cooling water filters.
- Chamber cleaning wipes and specialized solvents.
- Compatibility: Gasonics AWD series, GL series, and legacy wet benches.
- Shelf Life: 2 years for elastomeric components.
Functional Features:
- Leak Prevention: Replaces aged seals to maintain vacuum integrity and process gas purity.
- Contamination Control: Fresh filters prevent particulate and molecular contamination of wafers.
- Performance Restoration: Restores pump pumping speeds and RF matching efficiency to factory specifications.
- Quick Turnaround: Allows maintenance engineers to perform full PMs immediately without waiting for parts.
Application Scenarios:
- Scheduled Maintenance: Used during quarterly or semi-annual tool servicing intervals.
- Tool Refurbishment: Essential for restoring used tools to production-ready condition.
- Troubleshooting: Replacing seals to resolve vacuum leak alarms or process instability.
- Clean Room Compliance: Ensuring the tool meets strict particle emission standards (SEM S2/S8).
