Digital guide
You are here:
Gasonics 95-0503 95-2665
Product Description: These part numbers typically refer to a Maintenance Kit or a Consumable Set for Gasonics wet bench or strip tools. The combination suggests a kit containing specific seals, O-rings, and filters required for major preventive maintenance (PM) cycles. “95-0503” might be the kit ID, while “95-2665” specifies a sub-component like a pump filter or a specific seal set.
Technical Specifications:
- Kit Type: Preventive Maintenance (PM) Kit
Detailed content
- Contents:
- Fluoropolymer O-rings (Viton/Kalrez) for chamber doors and viewports.
- Vacuum pump oil or dry pump cartridges.
- HEPA/ULPA filters for exhaust and clean room environments.
- RF window gaskets.
- Chamber cleaning wipes and solvents.
- Compatibility: Gasonics AWD series, GL series, and wet bench tools.
- Shelf Life: 2 years (for rubber components)
Functional Features:
- Leak Prevention: Replaces aged seals to maintain vacuum integrity and process stability.
- Contamination Control: Fresh filters prevent particulate and molecular contamination of wafers.
- Tool Uptime: Having the kit on-site allows maintenance engineers to perform PMs immediately without waiting for parts.
- Performance Restoration: Restores pump pumping speeds and RF matching efficiency.
Application Scenarios:
- Scheduled Maintenance: Used during quarterly or semi-annual tool servicing.
- Tool Refurbishment: Used when bringing a used tool back into production.
- Troubleshooting: Replacing seals to fix vacuum leaks or false “Vacuum Fail” alarms.
- Clean Room Compliance: Ensuring the tool meets particle emission standards.
