Digital guide
You are here:
Gasonics 95-0503 95-2665 A
Product Description: This part number refers to a specific variation of the Gasonics maintenance kit, focusing on Filtration and Abatement components. The “A” suffix often denotes a revised or upgraded version of the standard filter set. It typically includes Scrubber Cartridges and Exhaust Filters designed to neutralize hazardous byproducts from plasma and wet processes.
Technical Specifications:
- Kit Type: Chemical Filtration and Abatement Kit
Detailed content
- Components:
- Activated carbon and zeolite cartridges for acid gas (HF, HCl) abatement.
- Particulate filters (HEPA/ULPA) for exhaust streams.
- Ozone destruction catalysts.
- Gas phase filters for volatile organic compounds (VOCs).
- Housing Material: Stainless Steel 316L with electropolished finish.
- Flow Capacity: Rated for specific tool exhaust volumes (e.g., 100 CFM).
Functional Features:
- Toxic Gas Neutralization: Chemically reacts with and neutralizes acidic or toxic gases before they reach the facility exhaust.
- Odor Control: Effectively removes noxious odors associated with plasma ashing.
- Environmental Compliance: Ensures the fab meets local and international environmental safety standards (EPA, OSHA).
- Particulate Containment: Traps any particles entrained in the exhaust gas stream.
Application Scenarios:
- Plasma Strip Tools: Filtering exhaust from oxygen/CF4 plasma ashers.
- Wet Etch Benches: Scrubbing acid vapors from RCA or Piranha stations.
- CVD/PVD Tools: Filtering unreacted precursors and toxic byproducts (e.g., WF6).
- Hazardous Material Handling: Required for any process generating toxic, corrosive, or pyrophoric byproducts.
