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Gasonics 94-1174 Chamber Seal
Introduction:
The Gasonics 94-1174 is a sealing kit, typically consisting of elastomeric O-rings, gaskets, or quad-rings. These components are critical for maintaining the vacuum integrity of the process chamber, ensuring that gases do not leak in or out and that the required vacuum level is achieved and sustained.
Technical Specifications:
- Component Type: Static or Dynamic Seal
- Material: Viton (FKM), Kalrez (FFKM), or Buna-N (Nitrile)
Detailed content
- Hardness: 70 Shore A to 90 Shore A (depending on application)
- Outgassing Rate: < 1 x 10^-6 Torr-L/s/cm² (Low outgassing for vacuum)
- Temperature Range: -20°C to +200°C (Viton) or up to 300°C (Kalrez)
- Chemical Resistance: Resistant to plasma byproducts and cleaning solvents
Functional Features:
- Vacuum Tightness: Prevents atmospheric air (Oxygen/Nitrogen) from entering the chamber, which would contaminate the plasma.
- Plasma Resistance: Specialized materials resist erosion from active plasma species.
- Compression Set Resistance: Maintains sealing force over long periods without permanent deformation.
- Particle Minimization: Designed to minimize the generation of particles during compression cycles.
Application Scenarios:
- Chamber Door Seal: Sealing the main access door of the plasma chamber.
- Viewport Seal: Sealing quartz or sapphire viewing windows.
- Feedthrough Seal: Sealing electrical or mechanical feedthroughs passing through the chamber wall.
- Gas Injector Seal: Ensuring process gases enter the chamber at the injector point without leaking.
- Preventive Maintenance: Routinely replaced during scheduled maintenance to ensure tool uptime and vacuum performance.
