Digital guide
You are here:
Gasonics 90-2590
Product Description: The Gasonics 90-2590 is typically identified as a Robotic Transfer Arm Assembly or a Wafer Handling End Effector for Gasonics automated wet benches and cluster tools. It is the core mechanism responsible for moving wafers between cassettes, process tanks, and chill/rinse stations with high precision and speed.
Technical Specifications:
- Component Type: Vacuum Robotic Arm / End Effector
Detailed content
- Degrees of Freedom: 3-axis or 4-axis configuration (Z, Theta, R, Y)
- Material: Aluminum or Carbon Fiber composite for low particle generation
- Drive System: Brushless DC servo motors with high-precision encoders
- Wafer Holding: Dual-zone vacuum chuck with edge grip or back-side cooling capability
- Positioning Accuracy: ±0.5mm or better
- Speed: Optimized for high-throughput (e.g., 15 wafers per minute)
Functional Features:
- High-Speed Transfer: Minimizes cycle time between process steps to increase overall tool throughput.
- Gentle Handling: Precise control of acceleration and deceleration to prevent wafer slippage or damage.
- Programmable Path: Flexible teaching points to accommodate different cassette configurations and tank layouts.
- Sensor Integration: Equipped with wafer presence sensors and crash detection sensors.
Application Scenarios:
- Automated Wet Benches: Transferring wafers between acid tanks, rinse tanks, and dryers.
- Cluster Tools: Moving wafers between load locks, degas stations, and processing chambers.
- Sorting and Buffering: Used in standalone sorters to organize wafers by process step or lot number.
- Inspection Stations: Loading wafers into metrology tools (CD-SEM, ellipsometers).
