• Body Material: Stainless Steel 316L or Brass (depending on pressure rating)
• Seat Material: Reinforced PTFE or PFA
• Diaphragm Material: EPDM, NBR, or FKM (Viton) for general service; PTFE for corrosive service
• Port Size: 1/4 inch to 1 inch (NPT, BSPP, or VCR)
• Operating Pressure: Up to 150 PSI (10 bar)
• Operating Temperature: -10°C to +120°C (Standard) / -20°C to +180°C (High Temp)
• Actuation: Single acting (Spring return) or Double acting (Pneumatic pilot)

Functional Features:

• Bubble-Tight Shutoff: Ensures zero leakage when closed, critical for maintaining vacuum integrity and gas purity.
• Corrosion Resistance: Stainless steel construction resists rust and corrosion from moisture and mild chemicals.
• Manual Override: Many models include a manual knob or lever for emergency operation during power loss.
• Visual Position Indicator: Clear indication of valve open/closed status for operator safety and troubleshooting.
• Compact Design: Small footprint allows for dense packing in gas panel manifolds.

Application Scenarios:

• General Purpose Gas Lines: Controlling inert gases like Nitrogen, Helium, or Argon in distribution manifolds.
• Cooling Water Systems: Regulating water flow to RF generators or chamber cooling jackets.
• Pneumatic Control Lines: Acting as a pilot valve for larger pneumatic cylinders or actuators.
• Vent/Drain Lines: Automated draining of condensate or venting of trapped gas pockets.
• Facility Monitoring Systems (FMS): Integration into building automation for gas safety interlocks.