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Gasonics 16206-01
Product Description: This component is typically identified as a high-precision Pressure Control Sensor or Transducer Module utilized within Gasonics vacuum processing equipment. It serves as a critical feedback device for the throttle valve control loop, ensuring that the process chamber maintains the exact vacuum level required for stable plasma generation and uniform chemical reactions.
Technical Specifications:
- Component Type: Capacitance Manometer or Piezoresistive Pressure Transducer
Detailed content
- Measurement Range: 0 to 10 Torr, 0 to 1000 mTorr, or 0 to 100 Torr (variant specific)
- Accuracy: High precision, typically ±0.5% of full scale or better
- Output Signal: 0-5V DC, 0-10V DC, or 4-20mA current loop
- Wetted Materials: Stainless Steel 316L or Aluminum (anodized)
- Electrical Interface: D-Sub connector or circular military-spec connector
- Thermal Range: Operating temperature from -10°C to 80°C
Functional Features:
- Closed-Loop Control: Provides real-time pressure data to the system controller for automated throttle valve adjustment.
- Gas Independence: Capacitance-based sensors offer accurate readings regardless of gas species or composition changes.
- Fast Response Time: Rapid reaction to pressure transients during gas injection or pump-down cycles.
- Robust Construction: Designed to withstand vibration and thermal cycling typical in semiconductor fabrication environments.
Application Scenarios:
- Plasma Etching: Maintaining precise pressure to control etch rates and anisotropy.
- CVD/PVD Processes: Ensuring stable deposition rates by controlling partial pressures of precursor gases.
- Vacuum Leak Detection: Used as a reference sensor during baseline pressure tests and leak checks.
- Process Endpoint Detection: Monitoring pressure signatures to determine the completion of a process step.
