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Gasonics 12-300000-30 High Voltage Power Supply (HVPS)
Introduction:
The Gasonics 12-300000-30 is a specialized high voltage power supply module designed to provide the necessary electrical potential for plasma ignition or ion acceleration within Gasonics process tools. It converts standard facility power into high-voltage DC or pulsed output required to sustain specific plasma densities.
Technical Specifications:
- Output Voltage: 0 to 30 kV DC (adjustable)
- Output Current: Up to 100 mA (depending on load)
Detailed content
- Ripple: < 0.1% (peak-to-peak) for stable plasma operation
- Regulation: Line and load regulation < 0.05%
- Isolation: Fully isolated output with high dielectric strength
- Interlocks: Hardwired safety interlocks for door access and over-current protection
Functional Features:
- Remote Programming: Controlled via analog signal (0-10V) or digital interface from the tool’s main controller.
- Arc Protection: Fast-acting crowbar circuits to short the output in case of an arc, protecting the supply and the chamber.
- Soft Start: Gradual voltage ramp-up to prevent inrush current and component stress.
- High Efficiency: Switching mode design to reduce heat dissipation and power consumption.
Application Scenarios:
- Plasma Immersion Ion Implantation (PIII): Biasing the wafer or chamber walls to accelerate ions.
- Sputtering (PVD): Providing the DC bias for target sputtering.
- Plasma Enhanced CVD (PECVD): Assisting in the dissociation of precursor gases at lower temperatures.
- Electron Cyclotron Resonance (ECR) Sources: Powering the microwave or magnetic confinement systems.
