Digital guide
You are here:
Gasonics 001-0000-39
Product Description: This part number generally refers to a Chamber Liner Kit or a specific Quartz Shield Assembly used in Gasonics plasma or wet bench tools. It acts as a sacrificial barrier protecting the main stainless steel process chamber from corrosive chemical attacks, plasma erosion, and metallic contamination. The kit ensures high purity by preventing metal ions from leaching into the process environment.
Technical Specifications:
- Component Type: Process Chamber Liner / Shield Kit
Detailed content
- Material: High-Purity Fused Quartz (SiO2) or Synthetic Quartz
- Purity Grade: Semiconductor grade (>99.99% SiO2)
- Dimensions: Custom-machined to fit specific chamber geometries (AWD, GL, or wet bench models)
- Surface Finish: Highly polished interior surfaces to minimize particle adhesion
- Includes: Liner walls, bottom shield, and viewports
Functional Features:
- Contamination Control: Acts as a physical barrier to prevent metallic impurities from the chamber walls from contaminating wafers.
- Chemical Resistance: Withstands aggressive acids (H2SO4, HF), bases, and halogen-based plasmas.
- UV Transparency: Allows optical sensors and cameras to monitor the process through the chamber walls.
- Easy Replacement: Designed as a modular kit for quick replacement during preventive maintenance to restore particle performance.
Application Scenarios:
- Plasma Etching/Ashing: Protecting the chamber during high-density plasma processes.
- Wet Chemical Cleaning: Lining RCA tanks or immersion baths to prevent metal staining.
- Preventive Maintenance: Routine replacement to maintain tool uptime and yield.
- High-Yield Semiconductor Production: Essential for processes where trace metal contamination causes device failure.
