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Applied Materials 0090-07135
Product Name
ATCA Process Control Compute Module, public alternate listing as RF Impedance Matching Component.
Product Introduction
Public supplier data lists this number as an AdvancedTCA semiconductor process controller with processor, memory, and communication interfaces. Separate low detail sources list it for RF impedance matching in etch systems. Confirm the exact hardware from the tool nameplate and schematic.
Detailed content
Technical Specifications
ATCA listing: processor Intel Core 2 Duo 1.5 GHz; memory 2 GB DDR-400 ECC; backplane power 12 V and 5 V DC; typical power 25 W.
Communication: 2 gigabit Ethernet ports, 4 RS232 serial ports, 2 USB 2.0 ports.
Chassis material: aluminum alloy.
Cooling: dual fan forced air in ATCA listing.
Operating temperature: 0 to 65°C in ATCA listing.
Storage temperature: minus 40 to plus 85°C.
Ingress protection: IP40 in ATCA listing.
Dimensions: 233.35 by 160 by 30 mm in ATCA listing.
Compliance: CE, RoHS, SEMI S2 in ATCA listing.
Functional Features
Real time process data acquisition and equipment communication.
Closed loop control support for temperature, pressure, and vacuum parameters in ATCA listings.
Modular ATCA form factor for chassis integration and maintenance.
RF matching variant information is limited in public sources.
Structural Characteristics
ATCA compute module with processor board, ECC memory, Ethernet/serial/USB interfaces, aluminum enclosure, and forced cooling. RF variant public data does not provide complete mechanical or electrical dimensions.
Working Principle
The ATCA module receives backplane power, runs process control software, collects sensor data through Ethernet or serial links, and drives valves, pumps, heaters, or matching functions according to the tool controller. RF variant purpose would depend on the assigned etch impedance circuit and is not fully documented in public results.
Application Scenarios
Etch, clean, deposition, and vacuum control subsystems in listed ATCA sources.
Fab compute or interface nodes requiring modular rack replacement.
RF match support only where the specific BOM confirms this number as a matching component.
Installation Requirements
Install in a compatible ATCA shelf with correct slot, power, and cooling airflow.
Verify firmware, software revision, and chassis compatibility before insertion.
Ground and shield communication cables to reduce EMI.
For RF related use, obtain the original AMAT installation manual and NDA restricted documents if required.
Usage Precautions
Do not operate without confirmed airflow because ATCA listing specifies forced cooling.
Match processor, memory, and firmware to the host tool software.
Inspect connectors and fan filters periodically.
If used in RF service, validate impedance range, calibration, and arc protection before plasma operation.
