Technical Specifications​

Manufacturer: Applied Materials.

Wafer size: 300 mm.

Component type: slit valve door assembly.

Door structure material: stainless steel.

Seal material: Viton elastomer.

Cross reference: public listing includes 10653300-0224.

Installation zone: load lock or transfer chamber interface.

Functional Features​

Precise open and close travel for wafer slot isolation.

Stainless steel door plate for vacuum and particle control.

Viton seal surfaces for repeatable vacuum closure.

Mechanical alignment features for chamber interface mating.

Structural Characteristics​

Precision machined stainless door with elastomer seal groove, actuator interface, mounting geometry, and alignment surfaces. The assembly is designed for minimal particle generation and stable sealing under cyclic vacuum operation.

Working Principle​

The door moves to uncover or cover the slit opening between chambers. When closed, the stainless plate and Viton seal separate downstream vacuum from the adjacent volume; when opened, the transfer robot moves the wafer through the slot while chamber isolation is maintained by the overall valve system.

Application Scenarios​

300 mm wafer lithography, etch, deposition, or metrology cluster tools.

Load lock to transfer chamber interfaces.

Vacuum transfer modules requiring particle and pressure control.

Installation Requirements​

Confirm AMAT part mark, revision, and cross reference before installation.

Inspect stainless surfaces for scratches, dents, and particle damage.

Check Viton seal compression face, door flatness, and shaft interface.

Install on compatible vacuum test fixture or tool interface and verify travel and leak performance.

Usage Precautions​

Do not reuse deformed or cracked Viton seals.

Verify revision compatibility with the existing slit valve actuator and chamber drawing.

Perform vacuum and particle verification after mechanical alignment.

Handle with cleanroom compatible tools and avoid contaminating seal surfaces.