Digital guide
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AMAT XU-BCD2081D (0190-14741)
Product Name: Yaskawa Linear Motor (LM) Driver Controller
Product Description: A high-performance multi-axis servo controller engineered by Yaskawa, customized for Applied Materials to drive precision linear motors in wafer positioning and robot systems. It delivers closed-loop motion control with nanometer-level accuracy.
Technical Specifications:
- Input Voltage: 200-240V AC, 3-phase, 50/60Hz
Detailed content
- Control Axes: 4-axis linear motor control
- Output Current: 10A/axis (continuous), 20A/axis (peak)
- Positioning Resolution: 1nm (encoder compatible)
- Communication: SERCOS III, EtherCAT, DeviceNet
- Sampling Frequency: 2kHz
- Protection: Over-voltage, over-current, over-temperature, short-circuit
- Dimensions: 482mm (W) x 300mm (D) x 177mm (H)
- Weight: 20kg
- Operating Temperature: 0°C to +45°C
Functional Features:
- Advanced PID algorithm for ultra-precise positioning
- High dynamic response for rapid, smooth acceleration/deceleration
- Built-in diagnostic and real-time monitoring
- Hot-swappable connector design for maintenance
- EMI/RFI shielded enclosure for industrial environments
Application Scenarios: Precision positioning of wafer stages, robot arms, and slit valves in AMAT 300mm Endura PVD and Centura systems.
