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AMAT T1102-01-290-1 High-Precision Temperature Sensor Assembly
Product Description: A specialized temperature measurement component designed for extreme environment monitoring in semiconductor processing equipment, offering exceptional accuracy and stability.
Technical Specifications:
- Sensor Type: Platinum RTD (Resistance Temperature Detector) with Class A accuracy
- Temperature Range: -200°C to +850°C operational range
Detailed content
- Accuracy: ±0.1°C within critical process temperature ranges
- Response Time: <1 second for rapid temperature change detection
- Construction: Hermetically sealed stainless steel housing with ceramic insulation
- Cable Length: Customizable up to 5 meters with high-temperature insulation
- Mounting: Threaded (1/4″ NPT) or flange mounting options available
Functional Features:
- Exceptional long-term stability with <0.05°C drift per year
- Immunity to electromagnetic interference common in semiconductor fabrication facilities
- Fast response time for critical process temperature monitoring
- High chemical resistance to process gases and cleaning chemicals
- Calibration traceable to NIST standards for quality assurance
- Designed for easy replacement without chamber venting in most applications
Application Scenarios:
- Temperature monitoring in high-temperature CVD and ALD processes
- Thermal profile measurement in rapid thermal processing (RTP) systems
- Critical temperature sensing in etch chamber liner and electrode components
- Wafer chuck temperature monitoring for uniform processing
- Vacuum chamber wall temperature measurement for process stability
