Digital guide
You are here:
Detailed content
Technical Specifications:
- Flow Range: 0–100 SCCM (Standard Cubic Centimeters per Minute)
- Control Accuracy: ± 1% of full scale
- Repeatability: ± 0.2% of full scale
- Response Time: < 150 ms
- Wetted Materials: 316L stainless steel, Hastelloy, Kalrez®
- Communication: DeviceNet™ / Analog (0–5 VDC)
Functional Features:
- Multi-gas / multi-range calibration flexibility
- On-board self-diagnostics and zero-stability control
- Corrosion-resistant to all reactive process gases
- High-temperature operation capability
- Complies with SEMI E25 and E26 standards
Application: Precisely controls the flow of specialty gases (Ar, O₂, N₂, SiH₄, NH₃) in CVD, ALD, and Etch processes.
