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AMAT MA-12432
Product Name: High-Precision Gas Pressure Regulator
Product Description: A single-stage, high-precision pressure regulator designed for the stable control of inlet pressure in ultra-high purity gas lines. It delivers a constant output pressure regardless of fluctuations in supply pressure.
Technical Specifications:
- Inlet Pressure: Up to 3000 PSI
Detailed content
- Outlet Pressure Range: 0 to 100 PSI
- Accuracy: ± 0.5% full scale
- Wetted Materials: 316L Stainless Steel (electropolished), PTFE
- Connection Type: 1/4 inch VCR face-seal fittings
- Leak Integrity: ≤ 1 x 10⁻¹⁰ atm-cc/sec He
Functional Features:
- Ultra-Stable Output: Maintains constant pressure under varying flow conditions.
- High Purity: Cleanroom assembled and vacuum-baked.
- Corrosion Resistance: Compatible with all semiconductor gases.
- Low Maintenance: Diaphragm-sealed design eliminates particulates.
- Precision Control: Fine adjustment knob for accurate pressure setting.
Application: Used in gas distribution systems for high-purity bulk and specialty gases.
