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AMAT LCAT200P-20001
Product Name: 200mm Wafer Cassette Alignment Tool
Product Description: A precision alignment tool designed for accurate positioning of 200mm wafer cassettes in AMAT Centura and Endura semiconductor manufacturing systems, ensuring proper wafer loading and transfer.
Technical Specifications:
- Material: Anodized aluminum alloy
Detailed content
- Wafer Compatibility: 200mm wafers
- Alignment Accuracy: ±0.05mm
- Dimensions: 300mm × 200mm × 100mm
- Weight: 2.5kg
- Surface Finish: Non-contaminating anodized coating
- Operating Temperature: 10°C to +35°C
- Cleanroom Compatibility: Class 100 cleanroom suitable
Functional Features:
- High-precision alignment for accurate cassette positioning
- Non-contaminating materials for process purity
- Ergonomic design for easy handling
- Durable construction for repeated use
- Compatibility with standard AMAT equipment
- Easy installation and adjustment
- Visual alignment guides for quick setup
Application Scenarios:
- AMAT Centura 200mm wafer systems
- AMAT Endura 200mm wafer processing equipment
- Wafer cassette loading stations
- Semiconductor manufacturing cleanrooms
- Wafer handling system setup and calibration
