Digital guide
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AMAT FC-0010-0047
Product Name: Thermal Mass Flow Controller
Product Description: A high‑precision thermal‑based mass flow controller designed to measure and regulate the flow rate of process gases with exceptional stability and repeatability in semiconductor manufacturing.
Technical Specifications:
- Sensing Principle: Thermal mass flow detection
Detailed content
- Flow Range: 0–1000 sccm
- Accuracy: ±1% of full scale
- Repeatability: ±0.1% of full scale
- Wetted Materials: 316L stainless steel, Hastelloy, PTFE
- Output Signal: 0–5V analog / RS‑485 digital
- Operating Temperature: 15°C to +35°C
Functional Features:
- Delivers ultra‑stable gas flow control for critical process recipes
- Fast response to setpoint changes with minimal overshoot
- Digital compensation for temperature and pressure variations
- Low pressure drop to optimize system performance
- Corrosion‑resistant wetted parts for compatibility with aggressive gases
Application Scenarios: Deployed in CVD, ALD, etch, and doping processes for precise control of specialty and carrier gases.
