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AMAT E-710K126X

Product Name: PI Digital Piezo Controller Module

Product Description: A digital control module designed to drive and control piezoelectric actuators for ultra-precise positioning in semiconductor processes.

Technical Specifications:

  • Output Voltage: 0-150V DC
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Detailed content

  • Control Interface: RS-232 & analog (0-10V)
  • Channels: Single-axis
  • Bandwidth: 10 kHz
  • Power Supply: 24V DC

    Functional Features:

  • Delivers sub-nanometer positioning resolution for piezo actuators.
  • Closed-loop control with integrated position feedback.
  • Dynamic digital signal processing for fast response.
  • Programmable motion profiles for precision positioning.

    Application Scenarios: Piezo-driven nano-positioning stages for wafer alignment and focus control in inspection and lithography systems.

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