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AMAT D-681810
Product Name: Precision Deep Groove Ball Bearing
Product Description: A high-precision single-row deep groove ball bearing engineered for smooth, low-friction rotational motion in semiconductor wafer handling and positioning systems.
Technical Specifications:
- Type: Single-row deep groove ball bearing
Detailed content
- Bore Diameter: 90 mm
- Outer Diameter: 115 mm
- Width: 13 mm
- Material: AISI 52100 chrome steel (rings/balls)
- Cage: Stainless steel (ribbon cage)
- Precision Class: ABEC-7 (ultra-precision)
- Radial Clearance: C1 (minimal, 0.002–0.008 mm)
- Limiting Speed: 8,000 rpm (grease lubricated)
- Load Rating: Dynamic 18.5 kN / Static 19.6 kN
- Temperature Range: -30°C to +120°C
Functional Features:
- Ultra-smooth rotation with minimal noise and vibration
- High precision for accurate positioning in wafer robots
- Low friction coefficient for energy-efficient operation
- High rigidity and resistance to radial/axial loads
- Cleanroom-compatible, low-outgassing grease lubrication
Application Scenarios: Precision rotation for wafer transfer robots, spin chucks, and pre-aligners in AMAT EFEM and wafer handling systems.
