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- Control Accuracy: ± 1% full scale
- Response Time: < 200 ms
- Wetted Materials: 316L SS, Hastelloy, Kalrez
- Communication: DeviceNet / Analog (0–5V)
Functional Features:
- Multi-gas, multi-range calibrations
- On-board self-diagnostics
- Zero stability and high repeatability
- Corrosion-resistant to all process gases
Application: Precisely controls reactive and carrier gas flows in CVD, Etch, and ALD processes.
