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AMAT AXF-600-423-5/8
- Product Name: AXF Series Electromagnetic Flow Meter
- Product Description: High-precision electromagnetic flow meter (Yokogawa ADMAG AXF) customized for Applied Materials, used to measure conductive fluid flow in ultra-pure water (UPW) and chemical delivery systems.
- Technical Specifications:
- Pipe Size: 5/8 inch (15 mm)
Detailed content
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- Flow Range: 0.1–10 L/min
- Accuracy: ±0.35% of measured value
- Liner Material: PFA (perfluoroalkoxy)
- Electrode Material: 316L Stainless Steel
- Power Supply: 24V DC
- Output Signals: 4–20mA analog, pulse, RS-485 Modbus
- Pressure Rating: 1.0 MPa (145 PSI)
- Operating Temperature: 0–60°C
- Functional Features:
- Dual-frequency excitation technology for stable measurement
- Zero stability and low flow sensitivity
- Electrode adhesion diagnosis for maintenance alerts
- IP67 weatherproof enclosure
- Non-intrusive, obstruction-free flow path
- Compatible with corrosive chemicals and ultra-pure water
- Applications: UPW flow monitoring in gas cabinets, chemical delivery systems, and process cooling loops on semiconductor manufacturing tools.
