Digital guide
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AMAT APDH-HB6-2
- Product Name: Optical Sensor Assembly, Wafer Position Detection
- Product Description: High-precision optical detection assembly for non-contact wafer position, presence, and edge sensing in semiconductor wafer handling systems.
- Technical Specifications:
- Sensing Technology: High-resolution infrared (IR) optical array
Detailed content
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- Detection Range: 0.1mm to 50mm
- Resolution: ±0.01mm
- Response Time: <1 ms
- Operating Temperature: 10°C to 45°C (cleanroom)
- Output: Digital (RS-485) + Analog (0-10V DC)
- Housing: Anodized aluminum, IP65-rated
- Functional Features:
- Non-contact detection prevents wafer scratching or contamination
- High precision ensures accurate wafer centering and positioning
- Immune to ambient light interference via filtered IR technology
- Built-in self-diagnostics and error reporting
- Easy calibration and alignment with integrated setup indicators
- Stable performance in high-vibration automated handling environments
- Application Scenarios:
- Used in AMAT Centura and Endura wafer handling platforms
- Deployed in EFEM (Equipment Front End Module) systems
- Applied for wafer mapping, presence detection, and edge sensing
- Utilized in 200mm and 300mm wafer transfer robots
- Integrated into semiconductor cleanroom automated material handling systems
