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AMAT 881-CE-0209-00
Product Name: RF Power Monitor Module
Product Description: A high-precision RF power measurement and monitoring module designed for real-time measurement of forward and reflected RF power in plasma process chambers.
Technical Specifications:
- Frequency Range: 400 kHz – 60 MHz
Detailed content
- Power Measurement Range: 0–5 kW (forward), 0–1 kW (reflected)
- Accuracy: ±1.0% full-scale
- Resolution: 1W
- Output Signal: 0–10V DC analog + RS-485 Modbus
- Input Impedance: 50Ω (matched)
- Power Supply: 24V DC
- Isolation: 1500V AC (input/output)
- Operating Temperature: 0°C to +50°C
- Dimensions: 177 mm × 100 mm × 50 mm
Functional Features:
- Simultaneous forward and reflected power monitoring
- High-speed sampling for dynamic plasma response tracking
- Built-in VSWR (Voltage Standing Wave Ratio) calculation
- Over-power alarm threshold with relay contact output
- Calibration-free design for long-term stability
Application Scenarios: RF power monitoring in AMAT PECVD, PVD, and Etch chambers (Endura, Centura) for process stability and fault detection.
