Digital guide
You are here:
AMAT 7100-6443-01C High-Voltage Power Supply Unit
Product Overview: The AMAT 7100-6443-01C is a high-performance high-voltage power supply unit designed exclusively for Applied Materials semiconductor equipment. It provides stable, precise high-voltage power to critical components such as ion sources, electrostatic chucks, and plasma generators, enabling the efficient operation of semiconductor manufacturing processes. This power supply unit is engineered with advanced voltage regulation technology and rugged construction to withstand harsh industrial environments, ensuring reliable performance and seamless integration with AMAT’s equipment control systems. It is a critical component for maintaining process quality and efficiency in high-volume semiconductor production.
Technical Specifications:
– Output Voltage: 0-10 kV (adjustable), with a voltage stability of ±0.1% of set value over 24 hours.
– Output Current: 0-100 mA (continuous wave), with a current stability of ±0.5% of set value.
– Input Power: 220V AC (single-phase), 50/60 Hz, power factor ≥ 0.95.
Detailed content
– Efficiency: ≥ 88%, reducing energy consumption and heat generation. – Protection Features: Over-voltage, over-current, over-temperature, and short-circuit protection; arc detection and shutdown (response time ≤ 1ms). – Operating Environment: Temperature range: 0°C to 50°C, humidity: 10-90% (non-condensing), vibration resistance: 10-500Hz, 0.3g rms. – Communication: RS-485 and Ethernet/IP interfaces for remote control and monitoring. – Physical Dimensions: 300mm (L) × 200mm (W) × 150mm (H), weight: 5kg, with DIN rail mounting. – Certification: Complies with EN 61010-1 (safety), EN 55011 (EMI), and SEMI S2/S8 safety standards.
Functional Features: – Delivers stable, precise high-voltage power to critical equipment components, ensuring consistent process performance. – Features automatic voltage and current regulation to compensate for load variations, maintaining constant output parameters. – Includes arc detection and shutdown functionality to prevent damage to the power supply and equipment components. – Supports remote control and monitoring via communication interfaces, allowing operators to adjust parameters and troubleshoot issues from a central control room. – Provides real-time feedback on output voltage, current, and operating status, enabling process traceability and maintenance planning. – Designed for high reliability, with a rugged construction and redundant components to minimize downtime. – Integrates seamlessly with AMAT’s equipment control system, enabling synchronized operation with other process modules.
Application Scenarios: – Used in AMAT’s ion implantation systems, electrostatic chucks, and plasma generators. – Applied in 200mm and 300mm wafer manufacturing lines for logic chips, memory chips (DRAM, NAND), and power semiconductor devices. – Ideal for processes requiring precise high-voltage control, such as ion acceleration and electrostatic wafer clamping. – Suitable for high-volume semiconductor fabs, where equipment uptime and process consistency are critical. – Used in research and development laboratories for developing new high-voltage-based semiconductor processes. – Installed in cleanroom environments (Class 1-100) where reliability and compatibility with other equipment are essential.
