Digital guide
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AMAT 3930-01083
Product Name: Heater/Susceptor Leveling System
Product Description: A precision electronic calibration tool for measuring and adjusting the tilt and level of wafer susceptors and heater assemblies.
Technical Specifications:
- Sensor Type: 3-channel capacitive displacement sensors.
Detailed content
- Measurement Range: ±5 mm.
- Resolution: 0.1 µm.
- Display: LCD, digital readout.
- Power: 110/220V AC or internal battery.
- Accuracy: ±1 µm.
Functional Features:
- Non-contact measurement to prevent surface damage.
- Real-time leveling feedback with visual/audio alerts.
- Stores calibration data for traceability.
- Portable, rugged design for field use.
Application Scenarios: Critical for aligning 200mm/300mm wafer susceptors in PVD and CVD chambers to ensure uniform film thickness.
