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AMAT 3930-00092

Product Name: 8-Zone Temperature Controller (Anafaze CLS 208)

Product Description: A multi-loop, precision temperature controller designed for regulating 8 independent heating zones in semiconductor process chambers.

Technical Specifications:
  • Control Zones: 8.
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Detailed content

  • Input Type: J, K, R, S, T thermocouples; RTD (Pt100).
  • Control Algorithm: PID + Auto-tuning.
  • Output: 4-20mA, Relay, SCR.
  • Accuracy: ±0.1% of full scale.
  • Communication: RS-232 / RS-485.

    Functional Features:

  • Simultaneous control and monitoring of eight heating zones.
  • Advanced auto-tuning for optimal temperature stability.
  • Programmable set points and ramp/soak profiles.
  • Comprehensive alarm functions (over-temp, sensor break).

    Application Scenarios: Precision temperature control for heater pedestals, gas lines, and showerheads in Producer SE and Centura 300mm systems.

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