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AMAT 3870-00209
Product Name: Pneumatic Diaphragm Valve Assembly
Product Description: A 2-way normally closed pneumatically actuated diaphragm valve for precise control of ultra-high purity fluids and gases in semiconductor process systems.
Technical Specifications:
- Valve Type: Diaphragm, 2-way, normally closed
Detailed content
- Diaphragm Material: PTFE with stainless steel core
- Port Size: 1/4″ VCR face-seal connections
- Operating Pressure: 20 to 150 PSIG
- Actuator: Pneumatic, 24V DC solenoid pilot
Functional Features:
- Metal-to-metal sealing ensures zero contamination in UHP applications.
- Tight shut-off with no internal leakage for process stability.
- Compact design for installation in confined gas panel spaces.
- Long cycle life exceeding 10 million operations.
Application Scenarios: Process gas control, chemical delivery, and purge systems in CVD, PVD, and ALD semiconductor manufacturing platforms.
