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Technical Specifications:
- Material: Chemraz (FFKM)
- Hardness: 75 Shore A
- Size: Custom cross-section and inner diameter for specific flange interfaces
- Temperature Range: -20°C to +327°C continuous
Functional Features:
- Ultra-low outgassing and particle emission for clean vacuum applications
- Excellent resistance to a wide range of corrosive process gases and plasmas
- Exceptional compression set resistance for long-term sealing integrity
- Complies with SEMI F20 standard for non-contaminating materials
Application: Used as a sealing element on vacuum chamber doors, flanges, and gas line connections in highly corrosive Etch and deposition processes.
