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AMAT 3700-02425
Product Name: High-Performance Formed Dovetail Seal O-Ring
Product Description: A precision-molded perfluoroelastomer (FFKM) O-ring designed for dovetail groove installations, providing exceptional vacuum sealing in high-temperature, chemically aggressive semiconductor process environments.
Technical Specifications:
- Material: Chemraz® SC513 perfluoroelastomer
Detailed content
- Hardness: 80 Shore A
- Temperature Range: -20°C to +270°C continuous service
- Cross-Section Diameter: 0.139 inches (3.53mm)
- Inner Diameter: Precision machined to chamber specifications
- Leak Rate: ≤1×10⁻¹¹ atm·cc/s He
Functional Features:
- Excellent resistance to all process gases, plasmas, and cleaning chemicals
- Dovetail design prevents extrusion and ensures secure positioning
- Low outgassing and particle generation for UHV compatibility
- Long service life with minimal compression set
- Certified for use in oxygen and corrosive gas services
Application Scenarios: Installed in chamber lids, viewports, gas injectors, and vacuum valve seals in etch, deposition, and cleaning chambers.
