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AMAT 3700-02322
Product Name: High-Performance O-Ring Seal
Product Description: A precision-molded elastomeric seal (O-Ring) for critical vacuum and fluid interfaces in semiconductor manufacturing equipment. It is designed for extreme reliability in harsh process conditions.
Technical Specifications:
- Material: High-grade fluoroelastomer (e.g., Chemraz, Kalrez, or Viton) for extreme chemical resistance.
Detailed content
- Durometer: Standard 75 Shore D for optimal compression set and sealing force.
- Size: Precision-machined to exact AMAT OEM dimensions for specific chamber interfaces.
- Compliance: SEMI standard compliant for low outgassing and particle generation.
Functional Features:
- Excellent resistance to a wide range of process chemicals, plasmas, and temperatures.
- Low compression set for long-term, leak-tight sealing.
- Ultra-smooth surface finish to minimize particle entrapment.
- Designed for high-cycle life in dynamic and static sealing applications.
Application Scenarios:
- Sealing for vacuum chambers, gas lines, slit valves, and pump interfaces.
- Used across all AMAT platform (Centura, Endura, Producer) for UHV and gas delivery applications.
