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AMAT 3700-02030
- Brand & Part Number: Applied Materials (AMAT) 3700-02030
- Product Name: Precision FFKM O-Ring Seal
- Product Description: A high-performance perfluoroelastomer (FFKM) O-ring seal designed for extreme semiconductor process environments. It provides exceptional chemical resistance, thermal stability, and ultra-low outgassing for critical vacuum and process sealing applications.
Detailed content
- Technical Specifications:
- Material: High-purity FFKM (perfluoroelastomer)
- Hardness: 75 Shore A
- Temperature Range: -20°C to +260°C continuous
- Chemical Compatibility: Resistant to all semiconductor process gases, plasmas, and chemicals
- Outgassing: Total mass loss (TML) ≤ 0.1%
- Cleanliness: Class 10 cleanroom manufactured and packaged
- Dimensions: Precision-machined to AS568A standard specifications
- Functional Features:
- Unmatched chemical resistance to corrosive gases and plasma
- Ultra-low outgassing prevents chamber contamination
- Excellent compression set for long-term sealing reliability
- Non-particulating design minimizes particle generation
- High thermal stability in rapid thermal cycling environments
- Compliant with SEMI semiconductor equipment standards
- Applications:
- Critical vacuum seals in process chambers, gate valves, and gas lines
- Seals for CVD, PVD, ALD, and etch process environments
- High-purity gas delivery systems and vacuum pump interfaces
- AMAT Centura, Endura, and Producer platform sealing
