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AMAT 3700-01893
Product Name: High-Performance O-Ring Seal
Product Description: A precision-engineered elastomeric seal designed for ultra-high vacuum applications in semiconductor processing equipment. It provides reliable sealing in harsh chemical and thermal environments.
Technical Specifications:
- Material: DuPont Kalrez perfluoroelastomer compound
Detailed content
- Size: AS-568A standard specification
- Hardness: 75 Shore A
- Temperature Range: -20°C to +260°C
- Leak Rate: <1×10⁻¹¹ atm-cc/sec He
- Chemical Compatibility: Resistant to all process gases and chemicals
Functional Features:
- Exceptional chemical resistance to aggressive process chemistries
- Excellent thermal stability in extreme temperature cycles
- Low outgassing properties for UHV compatibility
- Long service life with minimal compression set
- Consistent sealing performance over extended periods
- Compliance with semiconductor industry purity standards
Application Scenarios:
- Vacuum chamber door and port seals
- Gas line and valve connections
- Process chamber feedthroughs
- Semiconductor etch and deposition equipment
- AMAT Centura and Endura platform sealing systems
