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AMAT 3700-01615
Product Name: Brown Viton O‑Ring Seal
Product Introduction: A high-performance O‑ring seal made from brown Viton material, designed for vacuum and gas delivery systems in semiconductor manufacturing equipment.
Technical Specifications:
- Material: Brown Viton (fluoroelastomer) for chemical resistance
Detailed content
- Inner Diameter: 12.975 inches
- Cross-Section Diameter: 0.210 inches
- Temperature Resistance: Withstands extreme process temperatures (-20°C to +200°C)
- Chemical Compatibility: Resistant to semiconductor process gases and cleaning chemicals
Functional Features:
- Provides reliable, leak-tight sealing in high-vacuum environments
- Excellent resistance to chemical degradation from process fluids
- Maintains sealing integrity under thermal cycling conditions
- Long service life in aggressive semiconductor manufacturing environments
- Easy installation and replacement during system maintenance
Application Scenarios:
- Vacuum sealing in semiconductor process chamber connections
- Gas delivery system sealing for CVD, PVD, and etch processes
- O‑ring seal for AMAT equipment vacuum and gas line connections
- Replacement seal for semiconductor equipment maintenance and upgrades
