Digital guide
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Detailed content
- Hardness: 75 Shore A durometer
- Temperature Range: -20°C to +260°C (material-dependent)
- Cross-Section Diameter: Precision manufactured to OEM specifications
- Inner Diameter: Custom sized for specific sealing applications
- Vacuum Rating: 1×10⁻⁹ Torr leak rate
Functional Features:
- Excellent chemical resistance to process gases and chemicals
- Low compression set for long-term sealing performance
- High temperature stability for thermal cycle applications
- Ultra-low outgassing for vacuum compatibility
- Smooth surface finish to minimize particle generation
- Compliance with SEMI semiconductor equipment standards
Application Scenarios:
- Vacuum chamber door and access port seals
- Gas line and fluid connection seals
- RF feedthrough and electrical penetration seals
- Wafer handling robot seals
- Pump and valve interface seals
