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AMAT 3400-01109
Product Name: Male VCR Pipe Plug Fitting
Product Description: A high‑purity metal plug used to seal unused ports in gas lines, manifolds, and chamber fittings, maintaining vacuum integrity and cleanliness in ultra‑high purity gas systems.
Technical Specifications:
- Material: 316L electropolished stainless steel
Detailed content
- Connection Style: Male VCR face‑seal
- Pressure Rating: Full vacuum to 3000 PSI
- Leak Integrity: ≤1×10⁻¹⁰ atm·cc/s He
- Temperature Range: -50°C to +200°C
- Surface Finish: Ra ≤0.2μm
Functional Features:
- Creates a hermetic seal for unused gas line ports
- Prevents contamination ingress into gas delivery paths
- Resists corrosion from all semiconductor process gases
- Compact design for tight‑space installations
- Reusable without degradation in sealing performance
Application Scenarios: Used to cap unused ports on gas panels, MFC manifolds, valve blocks, and chamber flanges.
