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AMAT 3300-05358
Product Name: High-Purity Union Tube Fitting
Product Description: A precision-machined metal fitting used to connect two sections of process gas tubing in ultra-high purity (UHP) gas delivery systems.
Technical Specifications:
- Material: 316L Stainless Steel, electropolished (EP) internally.
Detailed content
- Connection Type: Face-seal (VCR) or compression fitting.
- Size: 1/4 inch OD tubing.
- Pressure Rating: Vacuum to 3000 PSI.
- Surface Finish: Ra ≤ 0.2μm for minimal particle entrapment.
Functional Features:
- Leak-Tight Seal: Metal-to-metal seal for zero leakage in UHP conditions.
- Non-Contaminating: Smooth, crevice-free internal bore prevents gas entrapment.
- Cleanroom Compatibility: Fully cleaned and bagged per SEMI standards.
- Reusable: Can be disconnected and re-seated multiple times.
Application: Used in gas cabinets, gas panels, and process chambers for the distribution of specialty gases (Ar, N₂, O₂, SiH₄, etc.).
