Digital guide
You are here:
Detailed content
- Surface Finish: Ra ≤ 0.38μm (15μin.) electropolished
- Pressure Rating: Vacuum to 3,000 PSI
- Temperature Range: -73°C to +450°C
- Seal Material: PTFE/Viton compatible
- Configuration: Straight union assembly
Functional Features:
- Metal-to-metal face seal design ensures zero leakage
- Easy installation and removal without special tools
- Full material traceability to SEMI standards
- Corrosion resistance to all ultra-high purity process gases
- Reusable design for multiple installation cycles
Application Scenarios:
- Ultra-high purity gas line connections in semiconductor fabs
- Gas distribution panels for CVD and ALD systems
- Vacuum system plumbing in process chambers
- Centura platform gas delivery components
